· Minimum feature/gap size: >= ~2 μm · Tolerance in feature height: ±15% of the channel height (or ±8% with our premium service) · For silicon wafers, all features should be placed in a 3.5" circle (for 4" wafer), or 4.5"-6.0" circle (for 6" wafer)
Accepted File Format
Preferred file format: .dxf and .dwg Other AutoCAD-compatible file formats (for example, .sldprt and .gds) are also accepted.
Design File Requirements
If you use another CAD system, be aware that not all are compatible with our graphical systems. By following the general drawing design rules below allows FlowJEM to fulfill your order in the most timely and cost-effective manner possible. Please note that if design changes are necessary to meet FlowJEM’s fabrication requirements, a design fee may be added and there may be an increase in our turnaround time.
1. Regardless of the type of CAD software you use to create your design, when drawing boundaries, use zero-width closed polylines. Use a close command to ensure that the area is completely closed. 2. Do not use hatching to identify filled surfaces on the mask. 3. Set up a grid in your drawing environment and use that grid for snap purposes. The snap function should always be on. 4. Ensure that the User Coordinate System is set to World. 5. Locate the data origin (0,0) near the data extents. The origin can be located near the lower left of the data extents, or your data can be centered around the origin, but do not locate data far away from the origin. 6. Do not allow boundaries to overlap or self-intersect. A boundary may touch itself (known as "re-entrant boundary"). 7. For .dxf file: before creating the file, please purge the drawing of all unused layers, objects, and text. 8. Unit should be either millimeter or micron.